Novel x-ray optics with Si wafers and formed glass

R. Hudec; L. Pina; V. Semencova; A. Inneman; M. Skulinova; L. Sveda; M. Mika; V. Brozek; R. Kacerovsky; J. Prokop; J. Sik

doi:10.1117/12.673306

13 June 2006 Novel x-ray optics with Si wafers and formed glass

R. Hudec, L. Pina, V. Semencova, A. Inneman, M. Skulinova, L. Sveda, M. Mika, V. Brozek, R. Kacerovsky, J. Prokop, J. Sik

Author Affiliations +

Proceedings Volume 6266, Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray; 62661H (2006) https://doi.org/10.1117/12.673306
Event: SPIE Astronomical Telescopes + Instrumentation, 2006, Orlando, Florida , United States

Abstract

The thermally formed thin glass foils and optically shaped Si wafers are considered to belong to the most promising technologies for future large space X-ray telescopes. We present and discuss the recent progress in these technologies, as well as properties of test mirrors produced and tested. For both technologies, both flat and curved samples have been produced and tested. The achieved profile accuracy is of order of 1 micrometer or better, while the bending technologies maintain the intrinsic fine surface microroughness of substrates (better than 0.5 nm for glass and around 0.1 nm for Si wafers).

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R. Hudec, L. Pina, V. Semencova, A. Inneman, M. Skulinova, L. Sveda, M. Mika, V. Brozek, R. Kacerovsky, J. Prokop, and J. Sik "Novel x-ray optics with Si wafers and formed glass", Proc. SPIE 6266, Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray, 62661H (13 June 2006); https://doi.org/10.1117/12.673306

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