Paper
20 September 2007 Progress in x-ray optics development with formed glass and Si wafers
R. Hudec, L. Pina, V. Semencova, M. Skulinova, A. Inneman, L. Sveda, M. Mika, R. Kacerovsky, J. Prokop, M. Cerny
Author Affiliations +
Abstract
The precisely shaped glass sheets and Si wafers are generally considered as the most promising substrates for future large space astronomical X-ray telescopes. Both approaches have demonstrated promising results obtained in the course of last years. In this contribution, we report on continued systematic efforts and analysis in precise shaping of thin glass sheets as well as Si wafers. New results will be briefly presented and discussed. For Si wafers, recent efforts focus also on improving the intrinsic quality of the slices to better meet the high requirements of future space projects.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. Hudec, L. Pina, V. Semencova, M. Skulinova, A. Inneman, L. Sveda, M. Mika, R. Kacerovsky, J. Prokop, and M. Cerny "Progress in x-ray optics development with formed glass and Si wafers", Proc. SPIE 6688, Optics for EUV, X-Ray, and Gamma-Ray Astronomy III, 668810 (20 September 2007); https://doi.org/10.1117/12.731727
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Cited by 2 scholarly publications.
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KEYWORDS
Silicon

Semiconducting wafers

Glasses

X-ray optics

X-ray telescopes

Wafer-level optics

Space telescopes

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