Lifetime of EUVL masks as a function of degree of carbon contamination and capping materials

Sungmin Huh; Hoon Kim; Gisung Yoon; Jaehyuck Choi; Han-Shin Lee; Dong Gun Lee; Byungsup Ahn; Hwan-Seok Seo; Dongwan Kim; Seoung Sue Kim; Han Ku Cho; Takeo Watanabe; Hiroo Kinoshita

doi:10.1117/12.772412

27 March 2008 Lifetime of EUVL masks as a function of degree of carbon contamination and capping materials

Sungmin Huh, Hoon Kim, Gisung Yoon, Jaehyuck Choi, Han-Shin Lee, Dong Gun Lee, Byungsup Ahn, Hwan-Seok Seo, Dongwan Kim, Seoung Sue Kim, Han Ku Cho, Takeo Watanabe, Hiroo Kinoshita

Author Affiliations +

Proceedings Volume 6921, Emerging Lithographic Technologies XII; 692115 (2008) https://doi.org/10.1117/12.772412
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

Lifetime of EUVL masks which are intentionally contaminated with carbon is investigated by comparing Si and Ru capping layer. Carbon deposition is observed not only on the multilayer, but also on the absorber sidewall of the mask. Deposited carbon on the sidewall during EUV exposure gradually varies mask CD and also induces the changes in the wafer printability and dose in the scanner. In addition, we compare the effects of carbon contamination between Si and Ru capped blank. Ru capped blank shows longer mask mean time between cleaning (MTBC) than Si capped blank by 25% in our experiments.

Citation Download Citation

Sungmin Huh, Hoon Kim, Gisung Yoon, Jaehyuck Choi, Han-Shin Lee, Dong Gun Lee, Byungsup Ahn, Hwan-Seok Seo, Dongwan Kim, Seoung Sue Kim, Han Ku Cho, Takeo Watanabe, and Hiroo Kinoshita "Lifetime of EUVL masks as a function of degree of carbon contamination and capping materials", Proc. SPIE 6921, Emerging Lithographic Technologies XII, 692115 (27 March 2008); https://doi.org/10.1117/12.772412

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available