Inner surface profile measurement of a hydrodynamic bearing by an oblique incidence and two-wavelength interferometer

Osami Sasaki; Ryota Yamamura; Kazushi Yokoyama; Takamasa Suzuki

doi:10.1117/12.827352

10 September 2009 Inner surface profile measurement of a hydrodynamic bearing by an oblique incidence and two-wavelength interferometer

Osami Sasaki, Ryota Yamamura, Kazushi Yokoyama, Takamasa Suzuki

Author Affiliations +

Proceedings Volume 7432, Optical Inspection and Metrology for Non-Optics Industries; 74320J (2009) https://doi.org/10.1117/12.827352
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

A collimated line beam is incident at an oblique incident angle of 0.61 rad into an inner surface of a hydrodynamic bearing whose inner diameter and length are 3 mm and 3.5 mm, respectively. Lights reflected in specified directions from the inner surface are selected to obtain an optical field whose phase distribution is proportional to the inner surface profile. This optical field interferes with a reference optical field in a two-wavelength interferometer using a tunable external cavity laser diode. Shapes of grooves with depth of about 5 μm and width of about 0.15 mm formed on the inner surface can be measured with an error less than 0.3 μm.

Citation Download Citation

Osami Sasaki, Ryota Yamamura, Kazushi Yokoyama, and Takamasa Suzuki "Inner surface profile measurement of a hydrodynamic bearing by an oblique incidence and two-wavelength interferometer", Proc. SPIE 7432, Optical Inspection and Metrology for Non-Optics Industries, 74320J (10 September 2009); https://doi.org/10.1117/12.827352

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