TSOM method for semiconductor metrology

Ravikiran Attota; Ronald G. Dixson; John A. Kramar; James E. Potzick; András E. Vladár; Benjamin Bunday; Erik Novak; Andrew Rudack

doi:10.1117/12.881620

20 April 2011 TSOM method for semiconductor metrology

Ravikiran Attota, Ronald G. Dixson, John A. Kramar, James E. Potzick, András E. Vladár, Benjamin Bunday, Erik Novak, Andrew Rudack

Author Affiliations +

Proceedings Volume 7971, Metrology, Inspection, and Process Control for Microlithography XXV; 79710T (2011) https://doi.org/10.1117/12.881620
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

Through-focus scanning optical microscopy (TSOM) is a new metrology method that achieves 3D nanoscale measurement sensitivity using conventional optical microscopes; measurement sensitivities are comparable to what is typical when using scatterometry, scanning electron microscopy (SEM), and atomic force microscopy (AFM). TSOM can be used in both reflection and transmission modes and is applicable to a variety of target materials and shapes. Nanometrology applications that have been demonstrated by experiments or simulations include defect analysis, inspection and process control; critical dimension, photomask, overlay, nanoparticle, thin film, and 3D interconnect metrologies; line-edge roughness measurements; and nanoscale movements of parts in MEMS/NEMS. Industries that could benefit include semiconductor, data storage, photonics, biotechnology, and nanomanufacturing. TSOM is relatively simple and inexpensive, has a high throughput, and provides nanoscale sensitivity for 3D measurements with potentially significant savings and yield improvements in manufacturing.

Citation Download Citation

Ravikiran Attota, Ronald G. Dixson, John A. Kramar, James E. Potzick, András E. Vladár, Benjamin Bunday, Erik Novak, and Andrew Rudack "TSOM method for semiconductor metrology", Proc. SPIE 7971, Metrology, Inspection, and Process Control for Microlithography XXV, 79710T (20 April 2011); https://doi.org/10.1117/12.881620

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