New reference material for transmission electron microscope calibration

M. N. Filippov; V. P. Gavrilenko; M. V. Kovalchuk; V. B. Mityukhlyaev; A. V. Rakov; P. A. Todua; A. L. Vasiliev

doi:10.1117/12.929551

11 October 2012 New reference material for transmission electron microscope calibration

M. N. Filippov, V. P. Gavrilenko, M. V. Kovalchuk, V. B. Mityukhlyaev, A. V. Rakov, P. A. Todua, A. L. Vasiliev

Proceedings Volume 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI; 84660D (2012) https://doi.org/10.1117/12.929551
Event: SPIE NanoScience + Engineering, 2012, San Diego, California, United States

Abstract

We propose a new type of reference material as a magnification standard of transmission electron microscope and a scanning transmission electron microscope. The reference material represents a thin cross-section of a silicon relief structure with certified sizes of its elements. It is fabricated using ion milling. Such reference material can be used for high microscope magnifications (by direct observation of the lattice), as well as for moderate magnifications (around 30,000 times).

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M. N. Filippov, V. P. Gavrilenko, M. V. Kovalchuk, V. B. Mityukhlyaev, A. V. Rakov, P. A. Todua, and A. L. Vasiliev "New reference material for transmission electron microscope calibration", Proc. SPIE 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, 84660D (11 October 2012); https://doi.org/10.1117/12.929551

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