Impact of process decisions and alignment strategy on overlay for the 14nm node

David Laidler; Koen D’havé; Philippe Leray; Jan Hermans; Juergen Boemmels; Shaunee Cheng; Huixiong Dai; Yongmei Chen; Bencherki Mebarki; Chris Ngai

doi:10.1117/12.2011968

12 April 2013 Impact of process decisions and alignment strategy on overlay for the 14nm node

David Laidler, Koen D’havé, Philippe Leray, Jan Hermans, Juergen Boemmels, Shaunee Cheng, Huixiong Dai, Yongmei Chen, Bencherki Mebarki, Chris Ngai

Author Affiliations +

Proceedings Volume 8683, Optical Microlithography XXVI; 868306 (2013) https://doi.org/10.1117/12.2011968
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

For the 14nm node and beyond there are many integration strategy decisions that need to be made. All of these can have a significant impact on both alignment and overlay capability and need to be carefully considered from this perspective. One example of this is whether a Litho Etch Litho Etch (LELE) or a Self Aligned Double Patterning (SADP) process is chosen. The latter significantly impacting alignment and overlay mark design. In this work we look at overlay performance for a Back End of Line (BEOL) SADP Dual Damascene (DD) process for the 14nm node. We discuss alignment mark design, particularly focusing on the added complexity and issues involved in using such a process, for example design of the marks in the Metal Core and Keep layers and recommend an alignment scheme for such an integration strategy.

Citation Download Citation

David Laidler, Koen D’havé, Philippe Leray, Jan Hermans, Juergen Boemmels, Shaunee Cheng, Huixiong Dai, Yongmei Chen, Bencherki Mebarki, and Chris Ngai "Impact of process decisions and alignment strategy on overlay for the 14nm node", Proc. SPIE 8683, Optical Microlithography XXVI, 868306 (12 April 2013); https://doi.org/10.1117/12.2011968

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available