Development of coherent EUV scatterometry microscope with high-order harmonic for EUV mask inspection

Yutaka Nagata; Tetsuo Harada; Masato Nakasuji; Hiroo Kinoshita; Katsumi Midorikawa

doi:10.1117/12.2023880

30 September 2013 Development of coherent EUV scatterometry microscope with high-order harmonic for EUV mask inspection

Yutaka Nagata, Tetsuo Harada, Masato Nakasuji, Hiroo Kinoshita, Katsumi Midorikawa

Proceedings Volume 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X; 884914 (2013) https://doi.org/10.1117/12.2023880
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

We have developed the standalone, coherent scatterometry microscope (CSM) for the inspection of extreme ultraviolet (EUV) lithography mask. The low divergence, coherent high-order harmonic (HH) was generated as coherent light source for CSM at a wavelength of 13.5 nm using a commercial laser system. The HH enable us to obtain the high contrast diffraction image from the mask. The diffraction light from the 2-nm wide line-defect and tens-nm size point-defects in the mask has been observed successfully with the system.

Citation Download Citation

Yutaka Nagata, Tetsuo Harada, Masato Nakasuji, Hiroo Kinoshita, and Katsumi Midorikawa "Development of coherent EUV scatterometry microscope with high-order harmonic for EUV mask inspection", Proc. SPIE 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X, 884914 (30 September 2013); https://doi.org/10.1117/12.2023880

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