Optimization of self-aligned double patterning (SADP)-compliant layout designs using pattern matching for 10nm technology nodes and beyond

Lynn T.-N. Wang; Uwe Paul Schroeder; Youngtag Woo; Jia Zeng; Sriram Madhavan; Luigi Capodieci

doi:10.1117/12.2219358

16 March 2016 Optimization of self-aligned double patterning (SADP)-compliant layout designs using pattern matching for 10nm technology nodes and beyond

Lynn T.-N. Wang, Uwe Paul Schroeder, Youngtag Woo, Jia Zeng, Sriram Madhavan, Luigi Capodieci

Author Affiliations +

Proceedings Volume 9781, Design-Process-Technology Co-optimization for Manufacturability X; 97810B (2016) https://doi.org/10.1117/12.2219358
Event: SPIE Advanced Lithography, 2016, San Jose, California, United States

Abstract

A pattern-based methodology for optimizing Self-Aligned Double Patterning (SADP)-compliant layout designs is developed based on detecting cut-induced hotspot patterns and replacing them with pre-characterized fixing solutions. A pattern library with predetermined fixing solutions is built. A pattern-based engine searches for matching patterns in the layout designs. When a match is found, the engine opportunistically replaces the detected pattern with a pre-characterized fixing solution, preserving only the design rule check-clean replacements. The methodology is demonstrated on a 10nm routed block. A small library of fourteen patterns reduced the number of cut-induced design rule check violations by 100% and lithography hotspots by 23%.

Citation Download Citation

Lynn T.-N. Wang, Uwe Paul Schroeder, Youngtag Woo, Jia Zeng, Sriram Madhavan, and Luigi Capodieci "Optimization of self-aligned double patterning (SADP)-compliant layout designs using pattern matching for 10nm technology nodes and beyond", Proc. SPIE 9781, Design-Process-Technology Co-optimization for Manufacturability X, 97810B (16 March 2016); https://doi.org/10.1117/12.2219358

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available