Design and characterization of two-axis rotational micromirrors using multi-user MEMS processes

Julianna E. Lin; Vikas Sharma; Feras S. J. Michael; Andrew G. Kirk

doi:10.1117/1.1445799

1 April 2002 Design and characterization of two-axis rotational micromirrors using multi-user MEMS processes

Julianna E. Lin, Vikas Sharma, Feras S. J. Michael, Andrew G. Kirk

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 1, Issue 1, (April 2002). https://doi.org/10.1117/1.1445799

Abstract

The design and characterization of a two-axis rotational micromirror is explored. The mirrors were fabricated using a commercial microelectromechanical system (MEMS) foundry service, known as the multi-user MEMS processes (MUMPs) foundry service. The prototypes were then characterized using a phase-shifting Mirau interferometer. From these results, it was shown that the MUMPs process can be used to create satisfactory designs for rotational micromirrors with tilt angles in the range of 0-23 mrad and control voltages in the range of 0-30 V. In addition, the behavior of these mirrors was shown to fall within 5% of the values predicted by the theoretical models for the devices.

©(2002) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Julianna E. Lin, Vikas Sharma, Feras S. J. Michael, and Andrew G. Kirk "Design and characterization of two-axis rotational micromirrors using multi-user MEMS processes," Journal of Micro/Nanolithography, MEMS, and MOEMS 1(1), (1 April 2002). https://doi.org/10.1117/1.1445799

Published: 1 April 2002

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