Mr. Alexey Kiselev Profile

Alexey Kiselev

at Troitsk Research and Development Ctr LLC

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Publications (1)

Proceedings Article | 28 September 2021 Poster + Presentation

TEUS: high-brightness EUV LPP light source based on fast rotating target: product overview and specifications

Mikhail Krivokorytov, Konstantin Koshelev, Alexander Vinokhodov, Oleg Yakushev, Vladimir Ivanov, Vladimir Krivtsun, Alexander Lash, Vyacheslav Medvedev, Vladimir Gubarev, Denis Glushkov, Samir Ellwi, Eugene Gorsky, Alexey Kiselev

Proceedings Volume 11854, 118541A (2021) https://doi.org/10.1117/12.2601008

KEYWORDS: Extreme ultraviolet, Light sources, Statistical analysis, Plasma, Metals, Magnetism, Ions, Silicon, Scanning electron microscopy, Pulsed laser operation

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