Mr. Andreas Vetter Profile

Andreas Vetter

at Karlsruher Institut für Technologie

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Author

Publications (5)

Proceedings Article | 13 May 2019 Presentation

Nanostructural beam splitter (Conference Presentation)

Jakub Szlachetka, Andreas Vetter, Karolina Słowik, Carsten Rockstuhl, Piotr Kolenderski

Proceedings Volume 11025, 110250X (2019) https://doi.org/10.1117/12.2520858

KEYWORDS: Beam splitters, Optical components, Nanoparticles, Photons, Wave propagation, Beam propagation method, Radio propagation, Waveguides, Lenses, Nanolithography

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Proceedings Article | 20 March 2018 Paper

Enabling proximity mask-aligner lithography with a 193nm CW light source

Raoul Kirner, Andreas Vetter, Dmitrijs Opalevs, Matthias Scholz, Patrick Leisching, Toralf Scharf, Wilfried Noell, Carsten Rockstuhl, Reinhard Voelkel

Proceedings Volume 10587, 105871F (2018) https://doi.org/10.1117/12.2297171

KEYWORDS: Lithography, Diffusers, Diffractive optical elements, Lithographic illumination, Continuous wave operation, Semiconductor lasers, 193nm lithography, Beam shaping, Microlens array, Light sources and illumination

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Proceedings Article | 20 March 2018 Paper

Mask-aligner Talbot lithography using a 193nm CW light source

Andreas Vetter, Raoul Kirner, Dmitrijs Opalevs, Matthias Scholz, Patrick Leisching, Toralf Scharf, Wilfried Noell, Carsten Rockstuhl, Reinhard Voelkel

Proceedings Volume 10587, 105870W (2018) https://doi.org/10.1117/12.2296503

KEYWORDS: Photomasks, Lithography, Lithographic illumination, Semiconducting wafers, Light sources, Semiconductor lasers, Beam shaping, Continuous wave operation, Crystals, Diffusers

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Proceedings Article | 15 February 2018 Paper

Semiconductor-based narrow-line and high-brilliance 193-nm laser system for industrial applications

D. Opalevs, M. Scholz, J. Stuhler, C. Gilfert, L. J. Liu, X. Y. Wang, A. Vetter, R. Kirner, T. Scharf, W. Noell, C. Rockstuhl, R. K. Li, C. T. Chen, R. Voelkel, P. Leisching

Proceedings Volume 10511, 105112C (2018) https://doi.org/10.1117/12.2290288

KEYWORDS: Laser systems engineering, Crystals, Deep ultraviolet, Lithography, Semiconductor lasers, Laser applications, Continuous wave operation, Nonlinear crystals, Photomasks, Laser crystals

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Proceedings Article | 1 March 2016 Paper

Travelling-wave single-photon detectors integrated with diamond photonic circuits: operation at visible and telecom wavelengths with a timing jitter down to 23 ps

Patrik Rath, Andreas Vetter, Vadim Kovalyuk, Simone Ferrari, Oliver Kahl, Christoph Nebel, Gregory Goltsman, Alexander Korneev, Wolfram H. Pernice

Proceedings Volume 9750, 97500T (2016) https://doi.org/10.1117/12.2210828

KEYWORDS: Diamond, Single photon detectors, Photonic integrated circuits, Integrated optics, Waveguides, Picosecond phenomena, Superconductors, Single photon, Sensors, Photodetectors, Nanowires, Photons, Silicon

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