Dr. Babak Mozooni Profile

Dr. Babak Mozooni

at ASML Netherlands B.V.

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Author

Publications (3)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

An accurate and robust after-develop overlay measurement solution using YieldStar multi-wavelength optical metrology accompanied by a precise application strategy

Pengzhen Zhang, Kai You, Pandeng Xuan, Yaobin Feng, Longfei Shen, Jolly Xu, Ji-Ling Hou, Saravana Prakash Shanmugasundaram, Summer Sui, Shiwei Ren, Chengkun Li, Jerry Fang, Toby Yu, Babak Mozooni

Proceedings Volume 11611, 116112U (2021) https://doi.org/10.1117/12.2583737

KEYWORDS: Overlay metrology, Optical metrology, Metrology, Lithography, High volume manufacturing, Etching, Diffraction

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Proceedings Article | 22 February 2021 Presentation + Paper

Fast in-device overlay metrology on multi-tier 3DNAND devices without DECAP and its applications in process characterization and control

Yaobin Feng, Pandeng Xuan, Dean Wu, Bruce Yang, Craig Xu, Neo Liu, Pavel Izikson, Huanian You, Xi-Zhi Yan, Vladimir Markov, Yvon Chai, Chaoyu Chen, Bert Verstraeten, Amy Wang, Gonzalo Sanguinetti, Giacomo Miceli, Jelmer Boter, Vidar Van der Meijden, Hua Li, Babak Mozooni

Proceedings Volume 11611, 116110V (2021) https://doi.org/10.1117/12.2583416

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Proceedings Article | 20 March 2020 Paper

A novel accurate and robust technique in after-etch overlay metrology of 3D-NAND’s memory holes

Yaobin Feng, Dean Wu, Pandeng Xuan, Pavel Izikson, Payne Qi, Huanian You, Yvon Chai, Jan Jitse Venselaar, Giulio Bottegal, Gonzalo Sanguinetti, Bert Verstraeten, Tjitte Nooitgedagt, Babak Mozooni

Proceedings Volume 11325, 1132522 (2020) https://doi.org/10.1117/12.2553054

KEYWORDS: Optical metrology, Overlay metrology, Semiconducting wafers, Signal processing, Metrology, Machine learning, Image processing, Optical signal processing, Optics manufacturing

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