Bharathi Bugata
Sr. Technical Program Manager at KLA Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 25 October 2016 Paper
Ron Taylor, Jack Downey, Jeffrey Wood, Yen-Hung Lin, Bharathi Bugata, Dongsheng Fan, Carl Hess, Mark Wylie
Proceedings Volume 9985, 99850L (2016) https://doi.org/10.1117/12.2241129
KEYWORDS: Reticles, Inspection, Inspection equipment, Factory automation, Manufacturing, High volume manufacturing, Control systems, Image processing, Semiconducting wafers, Roads

Proceedings Article | 27 May 2009 Paper
Thomas Jakubski, Michal Piechoncinski, Raphael Moses, Bharathi Bugata, Heiko Schmalfuss, Ines Köhler, Jan Lisowski, Jens Klobes, Robert Fenske
Proceedings Volume 7470, 74700V (2009) https://doi.org/10.1117/12.835193
KEYWORDS: Inspection, Inspection equipment, Instrument modeling, Photomasks, Factory automation, Manufacturing, Reticles, System integration, Interfaces, Rule based systems

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