Dr. Boaz Brill Profile

Dr. Boaz Brill

CEO at GluSense Ltd

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Author

Publications (9)

SPIE Journal Paper | 1 October 2011

Holistic metrology approach: hybrid metrology utilizing scatterometry, critical dimension-atomic force microscope and critical dimension-scanning electron microscope

Alok Vaid, Bin Bin Yan, Yun Tao Jiang, Mark Kelling, Carsten Hartig, John Allgair, Peter Ebersbach, Matthew Sendelbach, Narender Rana, Ahmad Katnani, Erin McLellan, Charles Archie, Cornel Bozdog, Helen Kim, Michael Sendler, Susan Ng, Boris Sherman, Boaz Brill, Igor Turovets, Ronen Urensky

JM3, Vol. 10, Issue 04, 043016, (October 2011) https://doi.org/10.1117/12.10.1117/1.3655726

KEYWORDS: Metrology, Scatterometry, Critical dimension metrology, Semiconducting wafers, Data modeling, Atomic force microscopy, Transmission electron microscopy, Inspection, 3D metrology

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Proceedings Article | 20 April 2011 Paper

A holistic metrology approach: multi-channel scatterometry for complex applications

Cornel Bozdog, Hyang Kyun Kim, Susan Emans, Boris Sherman, Igor Turovets, Ronen Urensky, Boaz Brill, Alok Vaid, Matthew Sendelbach

Proceedings Volume 7971, 797113 (2011) https://doi.org/10.1117/12.881638

KEYWORDS: Etching, Scatterometry, Channel projecting optics, Metrology, Data modeling, Polarization, Optics manufacturing, Metals, Semiconducting wafers

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Proceedings Article | 29 March 2011 Paper

A holistic metrology approach: hybrid metrology utilizing scatterometry, CD-AFM, and CD-SEM

Alok Vaid, Bin Bin Yan, Yun Tao Jiang, Mark Kelling, Carsten Hartig, John Allgair, Peter Ebersbach, Matthew Sendelbach, Narender Rana, Ahmad Katnani, Erin Mclellan, Chas Archie, Cornel Bozdog, Helen Kim, Michael Sendler, Susan Ng, Boris Sherman, Boaz Brill, Igor Turovets, Ronen Urensky

Proceedings Volume 7971, 797103 (2011) https://doi.org/10.1117/12.881632

KEYWORDS: Metrology, Critical dimension metrology, Scatterometry, Semiconducting wafers, Metals, Transmission electron microscopy, Data modeling, Atomic force microscopy, Inspection

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Proceedings Article | 2 April 2010 Paper

LER detection using dark field spectroscopic reflectometry

Boaz Brill, Shahar Gov, Dani Hak, Valery Sorin, Tal Marcu, Benjamin Bunday

Proceedings Volume 7638, 76380P (2010) https://doi.org/10.1117/12.846449

KEYWORDS: Line edge roughness, Diffraction, Reflectance spectroscopy, Scattering, Rayleigh scattering, Oxides, Field spectroscopy, Reflectometry, Spectroscopy, Amplifiers

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Proceedings Article | 23 March 2009 Paper

Product-driven material characterization for improved scatterometry time-to-solution

Alok Vaid, Carsten Hartig, Matthew Sendelbach, Cornel Bozdog, Hyang Kyun Kim, Michael Sendler, Yoel Cohen, Victor Kucherov, Boaz Brill, Stanislav Stepanov

Proceedings Volume 7272, 72720V (2009) https://doi.org/10.1117/12.814380

KEYWORDS: Scatterometry, Material characterization, Optical properties, Semiconducting wafers, Metals, Critical dimension metrology, Etching, Silicon, Metrology, Wafer-level optics

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Proceedings Article | 16 July 2002 Paper

Alternative approach for direct APC using scatterometry data

Boaz Brill, Yoel Cohen, Igor Turovets, Dario Elyasy, Tzevi Beatus

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473521

KEYWORDS: Scatterometry, Semiconducting wafers, Process control, Finite element methods, Diffraction, Neural networks, Lithography, Data modeling, Cadmium sulfide, Metrology

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Proceedings Article | 26 October 1998 Paper

System considerations in the design of QWIP-based thermal imagers

Boaz Brill, Gabby Sarusi

Proceedings Volume 3436, (1998) https://doi.org/10.1117/12.328023

KEYWORDS: Quantum well infrared photodetectors, Sensors, Systems modeling, Thermal modeling, Capacitors, Thermography, Imaging systems, Interference (communication), Electro optical modeling, Temperature metrology

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Proceedings Article | 26 October 1998 Paper

Development and performance of a 320x256 quantum well infrared photodector camera

Gabby Sarusi, Boaz Brill

Proceedings Volume 3436, (1998) https://doi.org/10.1117/12.328019

KEYWORDS: Quantum well infrared photodetectors, Thermography, Staring arrays, Cameras, Sensors, Infrared radiation, Semiconducting wafers, Infrared cameras, Imaging systems, Infrared imaging

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Proceedings Article | 13 August 1997 Paper

QWIP research and development of 320 x 256 QWIP arrays in ElOp

Boaz Brill, Gabby Sarusi

Proceedings Volume 3061, (1997) https://doi.org/10.1117/12.280398

KEYWORDS: Quantum well infrared photodetectors, Sensors, Scattering, Staring arrays, Gallium arsenide, Forward looking infrared, Semiconducting wafers, Reactive ion etching, Scanning electron microscopy, Black bodies

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Showing 5 of 9 publications

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