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Brian L. Harper
at Corning Incorporated
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Author
Publications (1)
Proceedings Article | 20 May 2004 Paper
Measuring thermal expansion variations in ULE glass with interferometry
Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.535133
KEYWORDS: Glasses, Ultrasonics, Refractive index, Prisms, Interferometry, Metrology, Extreme ultraviolet lithography, Photomasks, Spatial resolution, Refraction
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