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Dr. Kenneth E. Hrdina
Associate Development Scientist at Corning Incorporated
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Publications (4)
Proceedings Article | 20 May 2004 Paper
Measuring thermal expansion variations in ULE glass with interferometry
Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.535133
KEYWORDS: Glasses, Ultrasonics, Refractive index, Prisms, Interferometry, Metrology, Extreme ultraviolet lithography, Photomasks, Spatial resolution, Refraction
Proceedings Article | 16 June 2003 Paper
Measuring and tailoring CTE within ULE glass
Kenneth Hrdina, Bradford Ackerman, Andrew Fanning, Christine Heckle, David Jenne, W. Navan
Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.484925
KEYWORDS: Glasses, Ultrasonics, Metrology, Interferometers, Photomasks, Interferometry, Extreme ultraviolet lithography, Spatial resolution, Refraction, Optical components
Proceedings Article | 27 December 2002 Paper
Development of mask materials for EUVL
Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.467778
KEYWORDS: Glasses, Extreme ultraviolet lithography, Extreme ultraviolet, Photomasks, Inspection, Silica, Metrology, Polarimetry, Titanium, Transmission electron microscopy
Proceedings Article | 1 July 2002 Paper
Characterization and characteristics of a ULE glass tailored for EUVL needs
Kenneth Hrdina, Benjamin Hanson, Philip Fenn, Robert Sabia
Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472321
KEYWORDS: Glasses, Metrology, Extreme ultraviolet lithography, Ultrasonics, Inspection, Polishing, Silica, Surface finishing, Spatial resolution, Photomasks
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