Chaerin Yu
at Korea Institute of Machinery
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 June 2024 Paper
Proceedings Volume 13005, 130050X (2024) https://doi.org/10.1117/12.3021939
KEYWORDS: Metals, Liquids, Femtosecond phenomena, Optical lithography, Laser microstructuring, Oxides, Water, Resistance, Microfluidics, Electron beam lithography

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