Chang-Il Choi
at ASML
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 22 April 2024 Poster + Paper
Proceedings Volume 12957, 129571M (2024) https://doi.org/10.1117/12.3009845
KEYWORDS: Calibration, Optical proximity correction, Extreme ultraviolet, Data modeling, Education and training, Performance modeling, Advanced patterning, Metrology, Machine learning, Databases

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