Mr. Cheng Ching Hsu Profile

Cheng Ching Hsu

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Publications (1)

Proceedings Article | 8 November 2022 Presentation

Human machine competition in intelligent laser manufacturing in semiconductor processes

Chung-Yuan Chang, Cheng Ching Hsu, Tejender Rawat, Shih-Wei Chen, Albert Lin

Proceedings Volume 12221, 1222104 (2022) https://doi.org/10.1117/12.2632661

KEYWORDS: Semiconductor manufacturing, Semiconductors, Semiconductor lasers, Annealing, Laser manufacturing, Silicon, Process modeling, Physics, Optimization (mathematics), Thin films

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