Dr. Shih-Wei Chen Profile

Dr. Shih-Wei Chen

at Taiwan Semiconductor Research Institute

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 8 November 2022 Presentation

Human machine competition in intelligent laser manufacturing in semiconductor processes

Chung-Yuan Chang, Cheng Ching Hsu, Tejender Rawat, Shih-Wei Chen, Albert Lin

Proceedings Volume 12221, 1222104 (2022) https://doi.org/10.1117/12.2632661

KEYWORDS: Semiconductors, Thin films, Annealing, Silicon, Physics, Semiconductor lasers, Semiconductor manufacturing, Laser manufacturing, Optimization (mathematics), Process modeling

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years