Coby Zelnik
President at Sage Design Automation Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 15 March 2012 Paper
Proceedings Volume 8327, 832709 (2012) https://doi.org/10.1117/12.918067
KEYWORDS: Statistical analysis, Manufacturing, Lithography, Design for manufacturability, Standards development, Statistical modeling, Astatine, Double patterning technology, 193nm lithography

Proceedings Article | 30 October 2007 Paper
L. Karklin, A. Arkhipov, D. Blakely, M. Dingenen, A. Mehrotra, B. Watson, C. Zelnik, M. Cote, P. Hurat
Proceedings Volume 6730, 67300V (2007) https://doi.org/10.1117/12.747306
KEYWORDS: Manufacturing, Model-based design, Lithography, Design for manufacturability, Design for manufacturing, Optimization (mathematics), Silicon, Electronic design automation, Error analysis, Optics manufacturing

Proceedings Article | 21 March 2007 Paper
L. Karklin, A. Arkhipov, Y. Belenky, C. Decoin, D. Lay, V. Manuylov, C. Zelnik, B. Watson, J. Willekens
Proceedings Volume 6521, 65210Q (2007) https://doi.org/10.1117/12.711774
KEYWORDS: Silicon, Optical proximity correction, Design for manufacturing, Lithography, Manufacturing, Design for manufacturability, Process modeling, Photomasks, Computer simulations, Device simulation

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