Mr. David H. Peterson Profile

David H. Peterson

Manager ASML Product Process Engineering at ASML Wilton

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 29 August 2008 Paper

Deposition and characterization of challenging DUV coatings

Parag Kelkar, Bruce Tirri, Ron Wilklow, David Peterson

Proceedings Volume 7067, 706708 (2008) https://doi.org/10.1117/12.794752

KEYWORDS: Antireflective coatings, Optical coatings, Deep ultraviolet, Reflection, Polarization, Objectives, Apodization, Thin film coatings, Lens design, Thin films

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years