Dr. Elisabeth Camerotto Profile

Dr. Elisabeth Camerotto

at Lam Research Corp

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Author

Publications (2)

Proceedings Article | 22 February 2021 Presentation

Electrical validation of massive E-beam defect metrology in EUV-patterned interconnects

Nicola Kissoon, Etienne De Poortere, David Hellin, Stefan Decoster, Gayle Murdoch, Stephane Lariviere, Elisabeth Camerotto, Sandip Halder, Philippe Leray, Malgorzata Jurczak, Guillaume Schelcher

Proceedings Volume 11611, 116110Q (2021) https://doi.org/10.1117/12.2584807

KEYWORDS: Metrology, Inspection, Ruthenium, Metals, Extreme ultraviolet, Etching, Electron beam lithography, Defect detection

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Proceedings Article | 24 March 2020 Presentation

Holistic litho, films and etch for EUV DRAM storage node pad (Conference Presentation)

Cyrus Tabery, Nader Shamma, Nicola Kissoon, Elisabeth Camerotto, Mircea Dusa, Victor Blanco, Joost Bekaert, Rich Wise, Patrick Jaenen, Moyra McManus

Proceedings Volume 11329, 113290U (2020) https://doi.org/10.1117/12.2569606

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