Dr. Hee Yeoun Kim Profile

Dr. Hee Yeoun Kim

Head of Dept at National Nanofab Ctr

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Author

Publications (10)

Proceedings Article | 1 April 2016 Paper

Reversible nano-lithography for commercial approaches

Jae Hong Park, Hyun Ik Jang, Woo Choong Kim, Hae Yun, Jun Yong Park, Seok Woo Jeon, Hee Yeoun Kim, Chi Won Ahn

Proceedings Volume 9777, 977723 (2016) https://doi.org/10.1117/12.2205065

KEYWORDS: Nanostructures, Silicon, Polymers, Electron beam lithography, Lithography, Polymeric sensors, Polymeric actuators, Electro optic polymers, Solar energy, Process engineering, Nickel, Platinum, Nanolithography

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Proceedings Article | 19 March 2015 Paper

Advanced nano lithography via soft materials-derived and reversible nano-patterning methodology for molding of infrared nano lenses

Jae Hong Park, Hyun Ik Jang, Jun Yong Park, Seok Woo Jeon, Woo Choong Kim, Hee Yeoun Kim, Chi Won Ahn

Proceedings Volume 9423, 94231N (2015) https://doi.org/10.1117/12.2080980

KEYWORDS: Silicon, Nanostructures, Nickel, Lithography, Platinum, Polymers, Nanolithography, Infrared lenses, Infrared radiation, Lenses

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Proceedings Article | 19 June 2013 Paper

Wafer-level reliability characterization for wafer-level packaged microbolometer with ultra-small array size

Hee Yeoun Kim, Chungmo Yang, Jae Hong Park, Ho Jung, Taehyun Kim, Kyung Tae Kim, Sung Kyu Lim, Sang Woo Lee, Jay Mitchell, Wook Joong Hwang, Kwyro Lee

Proceedings Volume 8704, 87043E (2013) https://doi.org/10.1117/12.2015738

KEYWORDS: Semiconducting wafers, Microbolometers, Sensors, Resistance, Packaging, Reliability, Wafer bonding, Wafer testing, Wafer-level optics, Amorphous silicon

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Proceedings Article | 15 October 2012 Paper

Studies on transmittance of silicon with AR coating films for IR transparent window

Myeongho Song, Eunmi Park, Moon Hyun, Tae Kim, Hee Kim, Gawon Lee

Proceedings Volume 8512, 85120P (2012) https://doi.org/10.1117/12.928346

KEYWORDS: Silicon, Transmittance, Silicon films, Infrared sensors, Antireflective coatings, Zinc, Germanium, Semiconducting wafers, Sensors, Autoregressive models

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Proceedings Article | 31 May 2012 Paper

Study on optimizing the thickness of silicon window of WLP for IR sensor

Myeongho Song, Tae Hyun Kim, Moon Seop Hyun, Jae Hong Park, Hee Yeoun Kim, Gawon Lee

Proceedings Volume 8353, 83532B (2012) https://doi.org/10.1117/12.918982

KEYWORDS: Silicon, Transmittance, Semiconducting wafers, Infrared sensors, Sensors, Absorption, Oxygen, Packaging, Microelectromechanical systems, Germanium

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Proceedings Article | 31 May 2012 Paper

Development of microbolometer with high fill factor and high mechanical stability by shared-anchor structure

Taehyun Kim, Kimyung Kyung, Jae Hong Park, Young Su Kim, Sung Kyu Lim, Kyungmin Kim, Kwyro Lee, C. Welham, Hee Yeoun Kim

Proceedings Volume 8353, 83531B (2012) https://doi.org/10.1117/12.918916

KEYWORDS: Microbolometers, Readout integrated circuits, Sensors, Thermography, Resistance, Capacitance, Semiconducting wafers, Materials processing, Amorphous silicon, Infrared imaging

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SPIE Journal Paper | 1 January 2010

Fine-pitch high-efficiency spatial optical modulator for mobile display applications

Jong Hyeong Song, Sang Kyeong Yun, Hee-Yeoun Kim, Seungdo An, Heung-Woo Park, Yoon Joon Choi, Victor Yurlov, Anatoly Lapchuk, Chung Mo Yang, Sung Jun Lee, Jae Wook Jang, Ki Un Lee, Ki Suk Woo, El Bourim

JM3, Vol. 9, Issue 01, 013026, (January 2010) https://doi.org/10.1117/12.10.1117/1.3309711

KEYWORDS: Ferroelectric materials, Optical modulators, Actuators, Diffraction, Aluminum, Mirrors, Thermal effects, Silicon, Semiconducting wafers, Image quality

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Proceedings Article | 24 February 2009 Paper

Fine-pitch high-efficiency spatial optical modulator for mobile display applications

Jong Hyeong Song, Sang Kyeong Yun, Hee Yeoun Kim, Seungdo An, Heung Woo Park, Yoon Joon Choi, Victor Yurlov, Anatoliy Lapchuk, Chung Mo Yang, Sung Jun Lee, Jae Wook Jang, Ki Un Lee, Ki Suk Woo, El Bourim

Proceedings Volume 7208, 72080T (2009) https://doi.org/10.1117/12.808892

KEYWORDS: Aluminum, Ferroelectric materials, Silicon, Mirrors, Thermal effects, Actuators, Laser based displays, Temperature metrology, Modulation, Optical modulators

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Diffractive spatial optical modulators (SOM) with fine pitch pixel array were introduced for the mobile applications of laser projection display which requires the small volume, low power consumption and high optical efficiency. Micromechanical designs of piezoelectric (PZT) actuator and mirror ribbon structure were optimized for small volume, but keeping the same level of the other performance. Even though the same design rule and fabrication equipment were used for 10 um pitch SOM and 16 um pitch SOM, the optical efficiency of the fine pitch SOM was 78 % for the 0th order diffraction and is better than that of 16 um pitch SOM (73%). The full on/off contrast ratio has no difference between 10 um pitch and 16 um pitch SOM. All the optical characteristics coincide well with the theoretical estimations. High displacement of 500nm, which is enough to modulate the three Red, Green and Blue colors were achieved by the control of the thicknesses and stresses of constituent structural layers. It was found that the stress of Pt/PZT/Pt actuating layer was the main parameter affecting the initial gap height of the ribbon and also its displacement. For improving the optical properties of the SOM devices, the required ribbon-flatness could be achieved by applying a stress gradient on the SiN layer to compensate for the stress unbalance between Al mirror and SiN supprting layer. The temperature sensitive characteristics of the SOM device, which degrades the image quality, could be minimized by a mechanical compensation method using a thermal expansion effect of Si substrates. This concept could be applied in most of the bridge type MEMS structure. The most critical parameter which limit the SOM device lifetime was found to be the ribbon displacement degradation. By using a temperature accelerating lifetime measurement method based on the displacement degradation the estimated lifetime was more than 4,000 hrs and is of acceptable level in the mobile application. In short, the developed fine pitch SOM device, for making small volume of optical module, has sufficient response time and ribbon displacement for modulating the red, blue and green colors with one SOM chip and is suitable for high quality embedded laser projection displays. Optical module with VGA is successfully demonstrated for its potential applications in mobile laser projection display such as a embed projection cellular phone.

Proceedings Article | 21 February 2008 Paper

A novel diffractive micro-optical modulator for mobile display applications

Sang Kyeong Yun, JongHyeong Song, SeungDo An, InJae Yeo, YoonJoon Choi, YeongGyu Lee, HeungWoo Park, KyuBum Han, HaengSeok Yang, Victor Yurlov, Ihar Shyshkin, Anatoliy Lapchuk, HeeYeoun Kim, JaeWook Jang, JeHong Kyoung, JeongSuong Yang, SangKee Yoon, ChangSu Park, JongPil Cheong, YoungNam Hwang, KiSuk Woo, SeungWon Ryu, SeungWoo Lee, ChongMann Koh, YoungKi Baek, DaeHo Bae, HyunKee Lee, JaeHoon Lee, YungHo Ryu, HaeYeon Hwang, ChungMo Yang, OhkKun Lim, DongHyun Park, SeHwan An, JunHee Bae, SungMin Cho, BackSoon Go, SeokKee Hong, HoPhil Jung, SangJin Kim, KiUn Lee, JiHyun Park, JuHwan Yang, GiYoung Byun, SungHo Byun, YoungJin Cho, ChunGi Kim, JooHong Kim, SunKi Kim, SungIl Lee, WhaHyung Lee, KwanYoung Oh, SungKyung Oh, WooChul Shin, ByungKi Song, ElMostafa Bourim

Proceedings Volume 6887, 688702 (2008) https://doi.org/10.1117/12.762568

KEYWORDS: Glasses, Mirrors, Ferroelectric materials, Packaging, Metals, Laser based displays, Diffraction gratings, Modulation, Silicon, Diffraction

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Proceedings Article | 9 February 2007 Paper

Spatial optical modulator (SOM): high-density diffractive laser projection display

SangKyeong Yun, JongHyeong Song, InJae Yeo, YoonJoon Choi, Victor Yurlov, SeungDo An, HeungWoo Park, HaengSeok Yang, YeongGyu Lee, KyuBum Han, Ihar Shyshkin, Anatoliy Lapchuk, KwanYoung Oh, SeungWon Ryu, JaeWook Jang, ChangSu Park, ChunGi Kim, SunKi Kim, EungJu Kim, KiSuk Woo, JeongSuong Yang, EuiJoong Kim, JooHong Kim, SungHo Byun, SeungWoo Lee, OhkKun Lim, JongPil Cheong, YoungNam Hwang, GiYoung Byun, JeHong Kyoung, SangKee Yoon, JaeKwang Lee, TaeWon Lee, SeokKee Hong, YoonShik Hong, DongHyun Park, JungChul Kang, WooChul Shin, SungIl Lee, SungKyung Oh, ByungKi Song, HeeYeoun Kim, ChongMann Koh, YungHo Ryu, HyunKee Lee, YoungKi Baek

Proceedings Volume 6487, 648710 (2007) https://doi.org/10.1117/12.714699

KEYWORDS: Diffraction, Mirrors, Laser based displays, Diffraction gratings, Optical modulators, Laser applications, Modulation, Image quality, Projection systems, Microelectromechanical systems

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Showing 5 of 10 publications

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