Mr. Hidefumi Matsui Profile

Hidefumi Matsui

Staff Engineer at Tokyo Electron Ltd

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Publications (3)

Proceedings Article | 14 May 2004 Paper

Airborne contamination control for 157-nm lithography: influence of ammonia contamination

Hidefumi Matsui, Junichi Kitano, Kosuke Yoshihara, Etsurou Kawaguchi, Takamitsu Furukawa, Kentaro Matsunaga, Toshiro Itani, Kiyoshi Fujii

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.534975

KEYWORDS: Contamination, Lithography, Polymers, Coating, Transmittance, Adsorption, Contamination control, Critical dimension metrology, Polymer thin films, Spectroscopy

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Proceedings Article | 12 June 2003 Paper

Critical dimension (CD) control in 157-nm lithography

Shinya Hori, Kosuke Yoshihara, Hideharu Kyoda, Hidefumi Matsui, Takamitsu Furukawa, Seiro Miyoshi, Etsurou Kawaguchi, Toshiro Itani

Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485057

KEYWORDS: Critical dimension metrology, Photoresist processing, Coating, Lithography, Line edge roughness, Fluorine, Control systems, Contamination, Polymers, Semiconducting wafers

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Proceedings Article | 24 July 2002 Paper

Evaluation of resist-film property for CD control

Hiroshi Shinya, Takahiro Kitano, Hidefumi Matsui, Junichi Kitano

Proceedings Volume 4690, (2002) https://doi.org/10.1117/12.474269

KEYWORDS: Critical dimension metrology, Semiconducting wafers, Polymers, Photoresist processing, Coating, Optical lithography, Liquids, Quantitative analysis, Solids, Chemically amplified resists

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