Dr. Holger Stiel Profile

Dr. Holger Stiel

at MBI für Nichtlineare Optik Kurzzeitspektroskopie

SPIE Involvement:

Author

Publications (22)

Proceedings Article | 8 June 2023 Presentation

Presentation

Soft x-ray absorption spectroscopy in the lab using laser-based sources and novel reflection zone-plate optics

Holger Stiel, Julia Braenzel, Matthias Schnuerer, Johannes Tuemmler, Themis Sidiroupolos, Richard Gnewkow, Ioanna Mantouvalou, Christian Seifert, Alexei Erko, Thomas Krist, Lutz Ehrentraut, Marc Dummin

Proceedings Volume 12582, 125820C (2023) https://doi.org/10.1117/12.2665059

KEYWORDS: X-ray optics, X-rays, Zone plates, Absorption spectroscopy, Spectroscopy, X-ray sources, Ultrafast laser spectroscopy, Transition metals, Synchrotrons, Plasmas

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Proceedings Article | 8 July 2021 Open Access

Open Access

Paper

Ultrafast NEXAFS spectroscopy in the lab using laser-based sources and advanced X-ray optics

Holger Stiel, Julia Braenzel, Johannes Tuemmler, Adrian Jonas, Ioanna Mantouvalou, Alexei Erko, Anke Heilmann, Martin Moerbeck-Bock, Matthias Schnuerer

Proceedings Volume 11886, 1188612 (2021) https://doi.org/10.1117/12.2593295

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Proceedings Article | 8 July 2021 Open Access

Open Access

Paper

Transient laboratory X-ray absorption fine structure spectroscopy on thin films demonstrated with F8BT

Adrian Jonas, Katharina Witte, Birgit Kanngießer, Holger Stiel, Ioanna Mantouvalou

Proceedings Volume 11886, 1188611 (2021) https://doi.org/10.1117/12.2593245

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Proceedings Article | 18 April 2021 Presentation + Paper

Presentation + Paper

High average power OPCPA MIR-systems for coherent soft x-ray generation accessing absorption edges of metals

M. van Mörbeck-Bock, T. Feng, A. Heilmann, L. Ehrentraut, H. Stiel, M. Hennecke, T. Sidiropoulos, C. von Korff Schmising, S. Eisebitt, M. Schnürer

Proceedings Volume 11777, 117770C (2021) https://doi.org/10.1117/12.2591309

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Proceedings Article | 9 September 2019 Presentation + Paper

Presentation + Paper

Lab-scale soft x-ray ptychography: advanced nanoscale imaging and beam diagnostics

M. Zürch, F. Tuitje, T. Helk, J. Gautier, F. Tissandier, J. -P. Goddet, E. Oliva, A. Guggenmos, U. Kleineberg, H. Stiel, S. Sebban, C. Spielmann

Proceedings Volume 11111, 111110F (2019) https://doi.org/10.1117/12.2532063

KEYWORDS: Plasma, Extreme ultraviolet, Diffraction, X-rays, Optical amplifiers, X-ray imaging

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Proceedings Article | 17 May 2017 Paper

Paper

Soft x-ray nanoscale imaging using highly brilliant laboratory sources and new detector concepts

H. Stiel, J. Braenzel, A. Dehlinger, R. Jung, A. Luebcke, M. Regehly, S. Ritter, J. Tuemmler, M. Schnuerer, C. Seim

Proceedings Volume 10243, 1024309 (2017) https://doi.org/10.1117/12.2264222

KEYWORDS: Sensors, X-ray imaging, X-rays, Spatial resolution, Super resolution, CCD image sensors, Plasma, X-ray lasers, Imaging spectroscopy, Image resolution, X-ray microscopy, Cameras, Zone plates, Microscopes, Reconstruction algorithms

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Proceedings Article | 17 May 2017 Paper

Paper

Optimizing soft X-ray NEXAFS spectroscopy in the laboratory

I. Mantouvalou, A. Jonas, K. Witte, R. Jung, H. Stiel, B. Kanngießer

Proceedings Volume 10243, 1024308 (2017) https://doi.org/10.1117/12.2265600

KEYWORDS: Spectroscopy, X-rays, X-ray sources, Plasma, Zone plates, Absorption, X-ray lasers, X-ray characterization, Chemical species, Copper, Gold, Optical filters, Tin, Aluminum, Calibration, Laser development

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Proceedings Article | 22 September 2015 Paper

Paper

Cross-correlation measurement of femtosecond hard x-ray pulses from a laser plasma source: approaching 100 fs benchmark

Mazhar Iqbal, M. Ijaz, H. Stiel, D. Y. Noh, K. Janulewicz

Proceedings Volume 9589, 95890R (2015) https://doi.org/10.1117/12.2190195

KEYWORDS: X-rays, Nickel, Electrons, Pulsed laser operation, Femtosecond phenomena, Ultrafast phenomena, Near infrared, Plasma, Hard x-rays, X-ray sources

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Proceedings Article | 22 September 2015 Paper

Paper

Output beam polarisation of x-ray lasers with transient inversion

K. Janulewicz, C. M. Kim, H. Stiel, T. Kawachi, M. Nishikino, N. Hasegawa

Proceedings Volume 9589, 95890N (2015) https://doi.org/10.1117/12.2190178

KEYWORDS: Polarization, X-ray lasers, Amplifiers, Plasma, Oscillators, Plutonium, Beam splitters, Magnetism, Photonics, Silver

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Proceedings Article | 22 September 2015 Paper

Paper

3D nanoscale imaging of biological samples with laboratory-based soft X-ray sources

Aurélie Dehlinger, Anne Blechschmidt, Daniel Grötzsch, Robert Jung, Birgit Kanngießer, Christian Seim, Holger Stiel

Proceedings Volume 9589, 95890M (2015) https://doi.org/10.1117/12.2188324

KEYWORDS: Microscopes, X-rays, Zone plates, Visible radiation, Microscopy, X-ray microscopy, X-ray technology, X-ray imaging, Tomography, 3D image processing

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Proceedings Article | 30 September 2013 Paper

Paper

Prospects of ultrafast x-ray absorption investigations using laboratory based sources

Holger Stiel, Matthias Schnürer, Herbert Legall, Wolfgang Malzer, Lars Anklamm, Christopher Schlesiger, Karol Janulewicz, Mazhar Iqbal, Peter Nickles

Proceedings Volume 8849, 88490H (2013) https://doi.org/10.1117/12.2023906

KEYWORDS: X-rays, Crystals, X-ray sources, Absorption, Spectroscopy, Ultrafast phenomena, Pulsed laser operation, Plasma, Sensors, Electrons

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Proceedings Article | 11 December 2012 Paper

Paper

Laboratory full-field transmission x-ray microscopy

Christian Seim, Jonas Baumann, Herbert Legall, Christoph Redlich, Ioanna Mantouvalou, G. Blobel, Holger Stiel, Birgit Kanngießer

Proceedings Volume 8678, 867808 (2012) https://doi.org/10.1117/12.2011142

KEYWORDS: X-ray microscopy, X-rays, Microscopes, Plasma, Nitrogen, Tomography, Zone plates, Liquids, Synchrotrons, Spatial resolution

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Proceedings Article | 6 October 2011 Paper

Paper

Signal build-up from noise and seeding in plasma-based x-ray lasers

Chul Min Kim, Karol Janulewicz, Holger Stiel, Masaharu Nishikino, Noboru Hasegawa, Tetsuya Kawachi, Jongmin Lee

Proceedings Volume 8140, 814008 (2011) https://doi.org/10.1117/12.893468

KEYWORDS: Polarization, X-ray lasers, Picosecond phenomena, Light sources, Amplifiers, Interference (communication), X-rays, Physics, Performance modeling, Wave propagation

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Proceedings Article | 29 September 2009 Paper

Paper

X-ray laser takes the 100 Hz barrier

Holger Stiel, Johannes Tümmler, Robert Jung, Peter Nickles, Wolfgang Sandner

Proceedings Volume 7451, 745109 (2009) https://doi.org/10.1117/12.826317

KEYWORDS: Optical amplifiers, Picosecond phenomena, X-ray lasers, Imaging spectroscopy, Laser applications, Optical pumping, Pulsed laser operation, Laser systems engineering, Plasma, Disk lasers

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Proceedings Article | 29 September 2009 Paper

Paper

Research on the seeding of high-energy harmonic pulse into an x-ray lasing medium

Hyung Taek Kim, Chul Min Kim, Karol Adam Janulewicz, Kyung Taec Kim, I Jong Kim, Tae Jun Yu, Seong Ku Lee, Jae Hee Sung, Il Woo Choi, Holger Stiel, Johannes Tümmler, Tomas Mocek, Jaroslav Nejdl, Michaela Kozlová, Jongmin Lee

Proceedings Volume 7451, 74510W (2009) https://doi.org/10.1117/12.825959

KEYWORDS: X-rays, X-ray lasers, Picosecond phenomena, Polarization, Silver, Molybdenum, Pulsed laser operation, Modulation, Neon, Solids

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Proceedings Article | 12 September 2005 Paper

Paper

Elements of capillary optics applied in the spectral range between 10 and 15 nm

J. Tümmler, H. Stiel, H. Legall, R. Bruch, A. Bjeoumikhov, N. Langhoff, K. Janulewicz, G. Priebe, P. Nickles

Proceedings Volume 5919, 59190F (2005) https://doi.org/10.1117/12.617053

KEYWORDS: Beam splitters, Capillaries, Extreme ultraviolet, Optical components, Reflectivity, Plasma, Glasses, Charge-coupled devices, X-ray lasers, Zone plates

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Proceedings Article | 31 August 2005 Paper

Paper

Applications of highly oriented pyrolytic graphite (HOPG) for x-ray diagnostics and spectroscopy

Herbert Legall, Holger Stiel, Peter-Victor Nickles, Aniouar Bjeoumikhov, Norbert Langhoff, Michael Haschke, Vladimir Arkadiev, Reiner Wedell

Proceedings Volume 5918, 591802 (2005) https://doi.org/10.1117/12.614847

KEYWORDS: Crystals, X-rays, Spectrometers, Charge-coupled devices, Spectral resolution, Reflectivity, Sensors, Reflection, Copper, Absorption

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Proceedings Article | 16 June 2003 Paper

Paper

Characterization of a laser-produced plasma source for a laboratory EUV reflectometer

Frank Scholze, Frank Scholz, Johannes Tuemmler, Gerhard Ulm, Herbert Legall, Peter-Viktor Nickles, Wolfgang Sandner, Holger Stiel, Ludwig van Loyen

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.482646

KEYWORDS: Extreme ultraviolet, Plasma, Spectroscopy, Mirrors, Pulsed laser operation, Reflectometry, Laser energy, Charge-coupled devices, Calibration, Power meters

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With the development of EUV lithography there is an increasing need for high-accuracy at-wavelength metrology. In particular, there is an urgent need for metrology at optical components like mirrors or masks close to the production line. Sources for metrology have to fit different demands on EUV power and spectral shape than sources for steppers systems. We present the results of the radiometric characterization of a laser produced plasma (LPP)-source, newly developed at Max-Born-Institute Berlin for use in an EUV reflectometer. It is operated with a high-power pointing-stabilized laser beam (energy per pulse up to 700 mJ, 10 ns pulse duration, < ± 25 μrad pointing stability) at 532 nm which is focussed on a rotating Au target cylinder. The incident angle of the laser beam is set to 63°, the detecting angle 55° to the target normal. The source has been characterized regarding spectral photon flux, source size and source point stability. Two independently calibrated instruments, an imaging spectrometer and a double multilayer tool for in-band power measurements were used to obtain highly reliable quantitative values for the EUV emission of the Au-LPP source. Both instruments were calibrated by Physikalisch-Technische Bundesanstalt in its radiometry laboratory at the electron storage ring BESSY II. We obtained a source size of 30 μm by 50 μm (2s horizontal by vertical) and a stability of better than 2s=5 μm horizontally and 2s=9 μm vertically. A spectral photon flux of 1*10e14 /(s sr 0.1 nm) at 13.4 nm at a laser pulse energy of 630 mJ is obtained. The shot-to-shot stability of the source is about 5% (1s) for laser pulse energies above 200 mJ. For pulse energies between 200 mJ and 700 mJ, there is a linear relation between laser pulse energy and EUV output. The spectrum shows a flat continuos emission in the EUV spectral range, which is important for wavelength scanning reflectometry. High stability in total flux and spectral shape of the plasma emission as well as low debris was only obtained using a new target position for each shot. There is also a trade off between source size and EUV power. For a slightly defocused laser, an increase in EUV power up to a factor of two is obtained, while the source size also increases by about a factor of two. It is shown that an Au-LPP source provides spectrally flat reproducible emission with sufficient power at low debris conditions for the operation of a laboratory based EUV reflectometer.

Proceedings Article | 2 June 2003 Paper

Paper

New laboratory EUV reflectometer for large optics using a laser plasma source

Ludwig van Loyen, Thomas Boettger, Stefan Braun, Hermann Mai, Andreas Leson, Frank Scholze, Johannes Tuemmler, Gerhard Ulm, Herbert Legall, Peter Nickles, Wolfgang Sandner, Holger Stiel, Christian Rempel, Mirko Schulze, Joerg Brutscher, Fritz Macco, Stefan Muellender

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.485042

KEYWORDS: Extreme ultraviolet, Reflectivity, Sensors, Reflectometry, Beam splitters, Monochromators, EUV optics, Mirrors, Pulsed laser operation, Signal detection

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Proceedings Article | 23 October 2002 Paper

Paper

EUV-emission of xenon clusters excited by a high-repetition-rate burst-mode laser

Holger Stiel, Ulrich Vogt, Sargis Ter-Avetisyan, Matthias Schnurer, Ingo Will, Peter Nickles

Proceedings Volume 4781, (2002) https://doi.org/10.1117/12.450965

KEYWORDS: Pulsed laser operation, Picosecond phenomena, X-rays, Xenon, Plasma, Extreme ultraviolet lithography, Extreme ultraviolet, Absorption, Photodiodes, Spectrographs

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Proceedings Article | 14 November 2001 Paper

Paper

Absolute EUV yield of laser-irradiated Xe-clusters dependent on pulse width

Peter Nickles, Matthias Schnuerer, Holger Stiel, Ulrich Vogt, Sarkis Ter-Avetisyan, Wolfgang Sandner

Proceedings Volume 4504, (2001) https://doi.org/10.1117/12.448455

KEYWORDS: Xenon, Picosecond phenomena, Plasma, Pulsed laser operation, Absorption, Extreme ultraviolet, Spectroscopy, Ionization, Laser applications, Laser energy

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Proceedings Article | 20 August 2001 Paper

Paper

Scaling-up a liquid water jet laser plasma source to high average power for extreme-ultraviolet lithography

Ulrich Vogt, Holger Stiel, Ingo Will, Marek Wieland, Thomas Wilhein, Peter Nickles, Wolfgang Sandner

Proceedings Volume 4343, (2001) https://doi.org/10.1117/12.436685

KEYWORDS: Pulsed laser operation, Extreme ultraviolet lithography, Liquids, Plasma, Laser stabilization, Extreme ultraviolet, Laser systems engineering, Oxygen, Laser development, Spectrographs

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Showing 5 of 22 publications

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