Dr. Jaehwan Kim Profile

Dr. Jaehwan Kim

at Samsung Electronics

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Publications (2)

Proceedings Article | 23 March 2020 Presentation + Paper

Jaehwan Kim, Jin Kim, Byungchul Shin, Sangah Lee, Jae-Hyun Kang, Joong-Won Jeon, Piyush Pathak, Jac Condella, Frank Gennari, Philippe Hurat, Ya-Chieh Lai

Proceedings Volume 11328, 113280I (2020) https://doi.org/10.1117/12.2551970

KEYWORDS: Metals, Design for manufacturing, Chemical mechanical planarization, Silicon, Reliability, Optical proximity correction, Semiconducting wafers, Extreme ultraviolet lithography, Manufacturing, Yield improvement

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Proceedings Article | 4 April 2019 Presentation + Paper

A novel design-for-yield solution based on interconnect level layout improvements at 7nm technology node

Jaehwan Kim, Sangah Lee, Byungchul Shin, J. Jeon, Jin Kim, B. M. Kim, Jae-Hyun Kang, Seungweon Paek, Piyush Pathak, Frank Gennari, Philippe Hurat, Ya-Chieh Lai

Proceedings Volume 10962, 1096204 (2019) https://doi.org/10.1117/12.2514896

KEYWORDS: Computer aided design, Metals, Resolution enhancement technologies, Optical lithography, CMOS technology, Extreme ultraviolet, Extreme ultraviolet lithography, Lithography, Double patterning technology, Manufacturing

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