Dr. James N. McNames Profile

Dr. James N. McNames

Associate Professor at Portland State Univ

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Publications (3)

Proceedings Article | 17 May 2005 Paper

Oxide etch rate estimation using plasma impedance monitoring

Daniel Tsunami, James McNames, Bruce Whitefield, Paul Rudolph, Jeff Zola

Proceedings Volume 5755, (2005) https://doi.org/10.1117/12.599997

KEYWORDS: Etching, Plasma, Semiconducting wafers, Plasma etching, Wafer testing, Statistical analysis, Data modeling, Oxides, Error analysis, Process control

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Proceedings Article | 17 May 2005 Paper

Robust linear regression for modeling systematic spatial wafer variation

James McNames, Byungsool Moon, Bruce Whitefield, David Abercrombie

Proceedings Volume 5755, (2005) https://doi.org/10.1117/12.600198

KEYWORDS: Semiconducting wafers, Reticles, Data modeling, Optimization (mathematics), Statistical analysis, Photomasks, Optical lithography, Etching, Semiconductor manufacturing, Process modeling

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Proceedings Article | 17 May 2005 Paper

Wafer sampling by regression for systematic wafer variation detection

Byungsool Moon, James McNames, Bruce Whitefield, Paul Rudolph, Jeff Zola

Proceedings Volume 5755, (2005) https://doi.org/10.1117/12.600217

KEYWORDS: Semiconducting wafers, Monte Carlo methods, Inspection, Detection and tracking algorithms, Signal to noise ratio, Manufacturing, Algorithm development, Statistical analysis, Sensors, Semiconductor manufacturing

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