JeongHun Seo
at Samsung Electronics Co., Ltd.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 3 October 2018 Paper
Gregg Inderhees, Bill Kalsbeck, Alexander Tan, Paul Chung, JiUk Hur, Eric Kwon, Min Choo, Wonil Cho, Chan-Uk Jeon, IlYong Jang, In-Yong Kang, JeongHun Seo, Suein Son
Proceedings Volume 10810, 1081017 (2018) https://doi.org/10.1117/12.2511160
KEYWORDS: Inspection, Extreme ultraviolet, Photomasks, Reticles, Yield improvement, Coating, Optical lithography, Extreme ultraviolet lithography

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