Mr. Kim R. Vellore Profile

Kim R. Vellore

Senior member of technical staff at Applied Materials Inc

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Publications (1)

Proceedings Article | 15 April 2008 Paper

Wafer shape compensation at the track PEB for improved CD uniformity

Timothy Michaelson, Junyan Dai, Lu Chen, Hiram Cervera, Brian Lue, Harald Herchen, Kim Vellore, Nikolaos Bekiaris

Proceedings Volume 6923, 69233M (2008) https://doi.org/10.1117/12.772894

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Particles, Lithography, Scanners, Scanning electron microscopy, Wafer testing, Lutetium, Metrology, Silicon films

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