Dr. Laura Brigo Profile

Dr. Laura Brigo

Postdoctoral researcher

SPIE Involvement:

Author

Area of Expertise:

optics , nanofabrication , photonics , materials engineering , microfabrication , biosensing

Websites:

Company Website

Publications (4)

Proceedings Article | 27 March 2017 Paper

Chemical changes in hybrid photoresists before and after exposure by in situ NEXAFS analysis

Roberto Fallica, Benjamin Watts, Gioia Della Giustina, Laura Brigo, Giovanna Brusatin, Yasin Ekinci

Proceedings Volume 10146, 101461F (2017) https://doi.org/10.1117/12.2258215

KEYWORDS: Chemical analysis, Extreme ultraviolet lithography, X-rays, Photoresist materials, Absorption, X-ray lithography, Electron beam lithography, Materials science, Photoresist processing, Photoresist technology, Lithography, Extreme ultraviolet, Silicon, Photons

Read Abstract +

Proceedings Article | 28 August 2015 Presentation + Paper

Grating-coupled surface plasmon resonance gas sensing based on titania anatase nanoporous films

Enrico Gazzola, Michela Cittadini, Laura Brigo, Giovanna Brusatin, Massimo Guglielmi, Filippo Romanato, Alessandro Martucci

Proceedings Volume 9547, 95471D (2015) https://doi.org/10.1117/12.2186662

KEYWORDS: Hydrogen, Terahertz radiation, Plasmonics, Refractive index, Sensors, Electrons, Reflectivity, Surface plasmons, Gases, Titanium dioxide

Read Abstract +

Proceedings Article | 12 May 2015 Paper

Characterization of TiO2 thin films in the EUV and soft x-ray region

A. Comisso, A. Giglia, M. Nardello, E. Tessarolo, L. Calvillo, M. G. Sertsu, G. Granozzi, F. Gerlin, L. Brigo, P. Nicolosi

Proceedings Volume 9510, 95100Z (2015) https://doi.org/10.1117/12.2178142

KEYWORDS: Thin films, Reflectivity, Extreme ultraviolet, X-rays, Surface roughness, Titanium, Refractive index, Silicon, X-ray optics, Titanium dioxide

Read Abstract +

Proceedings Article | 10 September 2014 Paper

Hybrid materials: a bottom-up approach for nanotechnology applications

Laura Brigo, Erika Zanchetta, Gioia Della Giustina, Giovanna Brusatin

Proceedings Volume 9161, 91610B (2014) https://doi.org/10.1117/12.2066677

KEYWORDS: Lithography, Sol-gels, Photomasks, Resistance, Silicon, Scanning electron microscopy, Active optics, Nanostructures, Molecules, Optical lithography

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years