Dr. Laurent Marinier Profile

Dr. Laurent Marinier

at Philips Research

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Publications (1)

Proceedings Article | 4 May 2005 Paper

Anti-bubble topcoat for immersion lithography

Laurent Marinier, Yuri Aksenov, Rob Morton, David Van Steenwinckel, Peter Zandbergen

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.599643

KEYWORDS: Particles, Immersion lithography, Point spread functions, Pellicles, Defect detection, Monochromatic aberrations, Scanning electron microscopy, Liquids, Mie scattering, Scattering

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