Dr. Lynda K. Rowe Profile

Dr. Lynda K. Rowe

at Carleton Univ

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Publications (2)

Proceedings Article | 13 February 2008 Paper

Sub-micron optical waveguides for silicon photonics formed via the local oxidation of silicon (LOCOS)

F. Gardes, G. Reed, A. Knights, G. Mashanovich, P. Jessop, L. Rowe, S. McFaul, D. Bruce, N. Tarr

Proceedings Volume 6898, 68980R (2008) https://doi.org/10.1117/12.765383

KEYWORDS: Waveguides, Silicon, Polarization, Silicon photonics, Fabrication, Microelectronics, Optical testing, Oxides, Interfaces, Oxidation

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Proceedings Article | 9 February 2007 Paper

A CMOS-compatible rib waveguide with local oxidation of silicon isolation

Lynda Rowe, Michael Elsey, Edith Post, N. Garry Tarr, Andrew Knights

Proceedings Volume 6477, 64770L (2007) https://doi.org/10.1117/12.714641

KEYWORDS: Waveguides, Silicon, Oxides, Birefringence, Polarization, Integrated optics, Optical testing, Reactive ion etching, Optical fabrication equipment, Oxidation

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