Dr. Maciej Matys Profile

Dr. Maciej Matys

at Nagoya Univ

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 21 March 2023 Presentation

Tetsu Kachi, Hideki Sakurai, Testo Narita, Maciej Matys, Jun Suda

Proceedings Volume PC12421, (2023) https://doi.org/10.1117/12.2649083

KEYWORDS: Ion implantation, Gallium nitride, Doping, Switching, Magnesium, Diodes, Diffusion, Field effect transistors, Annealing

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Keywords/Phrases