Dr. Michel Despont
at CSEM SA
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 18 June 2024 Presentation + Paper
H. Sattari, I. Prieto, H. Zarebidaki, J. Leo, G. Choong, F. Arefi, M. Orvietani, A. Della Torre, A. Mettraux, F. Dubois, D. Herle, Y. Petremand, M. Palmieri, O. Dubochet, M. Despont
Proceedings Volume 13012, 130120H (2024) https://doi.org/10.1117/12.3026042
KEYWORDS: Photonic integrated circuits, Manufacturing, Thin films, Telecommunications, Lithium niobate, Waveguides, Standards development, Quantum processes, Design, Photonic quantum computing

Proceedings Article | 4 March 2019 Paper
Proceedings Volume 10931, 1093103 (2019) https://doi.org/10.1117/12.2513287
KEYWORDS: Micromirrors, Semiconducting wafers, Mirrors, Clouds, Microopto electromechanical systems, Wafer bonding, Electrodes, Spectrographs, Spectroscopy

Proceedings Article | 22 February 2018 Presentation + Paper
Proceedings Volume 10545, 105450I (2018) https://doi.org/10.1117/12.2285363
KEYWORDS: Optical filters, Silicon, Metals, Infrared radiation, Semiconducting wafers, Fabry–Perot interferometers, Microfabrication, Gold, Mirrors

Proceedings Article | 27 February 2015 Paper
S. Lani, Dara Bayat, M. Despont
Proceedings Volume 9375, 93750C (2015) https://doi.org/10.1117/12.2078618
KEYWORDS: Mirrors, Sensors, Piezoresistive sensors, Scanners, Microelectromechanical systems, Position sensors, Resistance, Micromirrors, Silicon, Wheatstone bridges

Proceedings Article | 1 October 2013 Paper
Felix Holzner, Philip Paul, Michel Despont, Lin Lee Cheong, James Hedrick, Urs Dürig, Armin Knoll
Proceedings Volume 8886, 888605 (2013) https://doi.org/10.1117/12.2032318
KEYWORDS: Electron beam lithography, Optical lithography, Nanolithography, Silicon, Polymers, Scanning probe lithography, Reactive ion etching, Photomasks, Lithography, Scanning electron microscopy

Showing 5 of 6 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top