CONFERENCE PROCEEDINGS
Advanced Search
Ming-Hui Weng
at TSMC
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 13 March 2018 Paper
Directed Self-Assembly (DSA) for contact applications
Ming-Hui Weng, Tsung-Han Ko, Chih-Jie Lee, Han-Ping Shen, Chieh-Han Wu, Ken-Hsien Hsieh, Yuan-Chien Huang, Cheng-Han Wu, Chung-Ju Lee, Ching-Yu Chang, Chin-Hsiang Lin
Proceedings Volume 10586, 105861D (2018) https://doi.org/10.1117/12.2303492
KEYWORDS: Directed self assembly, Polymethylmethacrylate, Picosecond phenomena, Etching, Scanning electron microscopy, Oxides, Optical lithography, Double patterning technology, Bridges, Polymers
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top