Dr. Prajith Karadan Profile

Dr. Prajith Karadan

at Paul Scherrer Institute

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Publications (1)

Proceedings Article | 10 April 2024 Presentation

Vertically tailored hybrid multilayer EUV photoresist with vertical molecular wire structure

Myung Mo Sung, Hyeonseok Ji, Jaehyuk Lee, Jinho Ahn, Chang Gyoun Kim, Sangsul Lee, Yasin Ekinci, Prajith Karadan, Dimitrios Kazazis

Proceedings Volume PC12953, PC129530K (2024) https://doi.org/10.1117/12.3009753

KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Photoresist materials, Line width roughness, Synchrotron radiation, Monolayers, Solubility, Resistance, Reproducibility, Outgassing

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