Dr. Riju Singhal Profile

Dr. Riju Singhal

at Veeco Instruments Inc

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Author

Publications (3)

Proceedings Article | 5 March 2021 Presentation

Reactive ion beam etch of slanted gratings for augmented reality

Vincent Ip, Frederick Pearsall, Tania Henry, Riju Singhal

Proceedings Volume 11696, 1169604 (2021) https://doi.org/10.1117/12.2582875

KEYWORDS: Etching, Reactive ion etching, Ion beams, Augmented reality, Silica, Metals, Photomasks, Oxygen, Ions, Gases

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Proceedings Article | 5 March 2021 Presentation + Paper

Effect of annealing on properties and performance of HfO2/SiO2 optical coatings for UV-applications

Matthias Falmbigl, Kyle Godin, Riju Singhal, Jason George, Binyamin Rubin

Proceedings Volume 11687, 116871U (2021) https://doi.org/10.1117/12.2578893

KEYWORDS: Optical coatings, Annealing, Sputter deposition, Pulsed laser operation, Absorption, Ultraviolet radiation, Semiconductor manufacturing, Semiconductor lasers, Reflectivity, Mirrors

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Proceedings Article | 22 February 2021 Presentation

Reactive ion beam etch of slanted gratings for augmented reality

Vincent Ip, Frederick Pearsall, Tania Henry, Riju Singhal

Proceedings Volume 11615, 116150H (2021) https://doi.org/10.1117/12.2582752

KEYWORDS: Etching, Reactive ion etching, Ion beams, Augmented reality, Silica, Metals, Photomasks, Oxygen, Ions, Gases

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