Robert Kern
at Enthought Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 March 2019 Paper
Proceedings Volume 10959, 109592N (2019) https://doi.org/10.1117/12.2514661
KEYWORDS: Line width roughness, Scanning electron microscopy, Image processing, Image analysis, Image filtering, Stochastic processes, Semiconducting wafers, Critical dimension metrology, Gaussian filters

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