Mr. Ryan Sporer Profile

Ryan Sporer

at GlobalFoundries Inc.

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Publications (2)

Proceedings Article | 20 June 2023 Presentation + Paper

Advanced process technologies for photonics waveguide patterning

Erik Geiss, Massud Aminpur, Ryan Sporer, Vijayalakshmi Seshachalam, Padraig Timoney, Brendan O'Brien, Josh LaRose, Eitan Barlaz, Cameron Werner, Katie Lutker-Lee, Luis Fernandez, Brian Pfeifer, Chimaobi Mbanaso, Yan Shao, Angélique Raley

Proceedings Volume PC12499, PC124990B (2023) https://doi.org/10.1117/12.2657729

KEYWORDS: Semiconducting wafers, Waveguides, Etching, Atomic layer deposition, Plasma etching, Plasma, Line edge roughness, Silicon, Vacuum ultraviolet, Film thickness

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Proceedings Article | 30 April 2023 Presentation

Challenges in advanced 300mm silicon photonics technology

Massud Aminpur, Erik Geiss, Vijayalakshmi Seshashalam, Brendan O'Brien, Jean Raymod Fakhoury, Joerg Paufler, San Leong Liew, Ken Shea, Keith Donegan, Ryan Sporer, Wenhe Lin

Proceedings Volume PC12499, PC124990A (2023) https://doi.org/10.1117/12.2658702

KEYWORDS: Silicon photonics, Waveguides, Semiconductor lasers, Quantum computing, Modulators, Manufacturing, Germanium, Diodes, Data centers

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