Dr. Salman Mokhlespour Profile

Dr. Salman Mokhlespour

Lithography System Performance Architect at ASML

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Publications (2)

Proceedings Article | 10 April 2024 Poster + Paper

Local variables measured using large field of view SEM images

Salman Mokhlespour, Ellaheh Barzegar, Willem van Mierlo, Zoi Dardani, Peter Sprau

Proceedings Volume 12955, 129551Y (2024) https://doi.org/10.1117/12.3006277

KEYWORDS: Line edge roughness, Line width roughness, Semiconducting wafers, Scanning electron microscopy, Distortion, Stochastic processes, Metrology, Bias correction, Error analysis

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Proceedings Article | 20 March 2018 Paper

Ultimate edge-placement control using combined etch and lithography patterning optimizations

Brennan Peterson, Rich Wise, Koen van der Straten, Katja Viantka, Melisa Luca, Salman Mokhlespour, Michael Kubis, Giordano Cattani, David Hellin, Daniel Sobieski, Girish Dixit, Nader Shamma, Vito Rutigliani, Patrick Jaenen, Sandip Halder, Philippe Leray

Proceedings Volume 10586, 105860A (2018) https://doi.org/10.1117/12.2297401

KEYWORDS: Etching, Critical dimension metrology, Line width roughness, Lithography, Line edge roughness, Stochastic processes, Semiconducting wafers, Optical lithography, Photomasks, Extreme ultraviolet

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