Shinji Mikami
at EUVL Infrastructure Development Ctr Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 19 March 2018 Paper
Eishi Shiobara, Shinji Mikami, Kenji Yamada
Proceedings Volume 10583, 105830B (2018) https://doi.org/10.1117/12.2297317
KEYWORDS: Metals, Contamination, Hydrogen, Extreme ultraviolet

Proceedings Article | 16 October 2017 Paper
Proceedings Volume 10450, 104500Q (2017) https://doi.org/10.1117/12.2280443
KEYWORDS: Metals, Extreme ultraviolet lithography, Contamination, Hydrogen, Extreme ultraviolet, Zinc, Mirrors, Absorbance, Lithography, Scanners

Proceedings Article | 18 March 2016 Paper
Eishi Shiobara, Yukiko Kikuchi, Shinji Mikami, Takeshi Sasami, Takashi Kamizono, Shinya Minegishi, Takakazu Kimoto, Toru Fujimori, Takeo Watanabe, Tetsuo Harada, Hiroo Kinoshita, Satoshi Tanaka
Proceedings Volume 9776, 97762H (2016) https://doi.org/10.1117/12.2219424
KEYWORDS: Contamination, Extreme ultraviolet, Extreme ultraviolet lithography, Metals, Hydrogen, Chemical elements, Mirrors, Reflectivity, Zirconium, Aluminum, Silicon, Germanium

Proceedings Article | 19 March 2015 Paper
Soichi Inoue, Shinji Mikami, Eishi Shiobara, Isamu Takagi, Hiroyuki Tanaka
Proceedings Volume 9422, 94221W (2015) https://doi.org/10.1117/12.2087301
KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Mirrors, Scanners, Photomasks, Relays, Plasma, Pellicles, Carbon dioxide lasers

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