Magnetorheological finishing (MRF) has been widely used in the field of modern optical machining due to the high certainty of processing. In the processing of spherical components, the detection means and sample preparation limit the acquisition of magnetorheological spherical tool influence function. In order to realize the high precision manufacturing of spherical components, the spherical removal function in the magneto-rheological polishing process is simulated and applied in practice. Based on the Preston equation, the material removal of the planar component was analyzed and the plane tool influence function model was established. On this basis, the correlation between spherical removal and plane removal was analyzed, and a simplified spherical tool influence function simulation method was proposed, and its accuracy was verified by experiments. Aiming at the processing of spherical components, the processing technology was improved and the actual processing was carried out. After processing, the PV value of the transmitted wavefront was 0.09λ, and the RMS value was 3.2 nm. The experimental results show that the spherical tool influence function simulated in this paper can be applied in actual processing and obtain a high-quality optical surface.
Due to the complexity and inhomogeneity of the distribution of the middle-spatial frequency errors (MSFE), the existing theoretical models cannot realize the manufacturability prediction of the smoothing process for the MSFE on the largeaperture optical components. Therefore, based on the parameterized time-domain smoothing model and the idea of regional division, a prediction algorithm suitable for the smoothing process of the MSFE in complex periods is proposed in this paper. The relevant verifiable experiments are carried out. The prediction results are in good agreement with the real data, which indicates that the prediction algorithm proposed in this paper can be applied to predict the smoothing process of the MSFE of large-aperture optical components and guide the polishing process.
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