In the present work, we experimentally demonstrate a suspended tunable subwavelength nanobeam cavity based on our recently proposed advanced dielectric bow-tie design combining ultra-low mode volume and high Q-factor. The nanobeam cavity is efficiently coupled to waveguide ports, allowing full integration with the existing silicon photonic platform and mitigation of the detuning between the optical mode and quantum emitter, which inevitably appears in a coupled system of an emitter and cavity due to fabrication disorder. The tunability of the nanobeam cavity is achieved through nanoelectromechanical actuation using electrostatic comb-drive actuators. The proposed bow-tie nanobeam cavity supports a fundamental optical mode confined in solid in the telecom C-band with a normalized mode volume below 0.12 and Q-factor of 3500. By applying the voltage to the comb-drive actuators, we experimentally observe the dynamic reconfigurability of the cavity resonance wavelength within 11 nm. Our findings can open a new prospect for efficient and tunable nanodevices for enhanced light-matter interactions.
Recent progress in photonics has highlighted the importance of miniaturization, particularly in achieving dielectric bowtie cavities with small mode volumes, which were previously limited to plasmonics. This study presents a novel method that combines top-down nanopatterning and bottom-up self-assembly to fabricate photonic cavities with atomic-scale dimensions. By utilizing surface forces, we demonstrate waveguide-coupled silicon photonic cavities with high quality factors, confining light to atomic-scale air gaps with an aspect ratio above 100, corresponding to mode volumes more than 100 times below the diffraction limit. These cavities exhibit unprecedented figures of merit for enhancing light-matter interaction and enable charting hitherto inaccessible regimes of solid-state quantum electrodynamics.
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