Dr. Ulrike A. Dauderstädt Profile

Dr. Ulrike A. Dauderstädt

Group manager SLM Research at Fraunhofer-Institut für Photonische Mikrosysteme

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Publications (19)

Proceedings Article | 12 July 2023 Open Access

Open Access

Paper

Towards a spatial light modulator technology for space applications: performance analysis under the environmental conditions

Sara Francés González, Dirk Berndt, Guzmán Borque Gallego, Donato Borrelli, Ulrike Dauderstädt, Peter Dürr, Markus Eckert, Jörg Heber, Detlef Kunze, Christophe Pache, Giuseppe Pilato, Valentina Raimondi, Enrico Suetta, Hannes Torlee, Antoine Ummel, Michael Wagner

Proceedings Volume 12777, 127773U (2023) https://doi.org/10.1117/12.2690567

KEYWORDS: Vacuum chambers, Temperature metrology, Spatial light modulators, Vibration, Mirrors, Micromirrors, Vacuum, Astronomical imaging, Aerospace engineering, Windows

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Proceedings Article | 12 July 2023 Open Access

Open Access

Paper

Super-resolved compressive demonstrator for Earth Observation applications in the Medium Infrared: instrumental concept, optical design and expected performances

Valentina Raimondi, Massimo Baldi, Dirk Berndt, Tiziano Bianchi, Guzmán Borque Gallego, Donato Borrelli, Roberto Carlà, Chiara Corti, Francesco Corti, Marco Corti, Ulrike Dauderstädt, Peter Dürr, Andrea Gonnelli, Sara Francés González, Donatella Guzzi, Demetrio Labate, Nicolas Lamquin, Cinzia Lastri, Enrico Magli, Emiliano Marzi, Vanni Nardino, Christophe Pache, Lorenzo Palombi, Giuseppe Pilato, Enrico Suetta, Diego Valsesia, Michael Wagner

Proceedings Volume 12777, 1277741 (2023) https://doi.org/10.1117/12.2690634

KEYWORDS: Reconstruction algorithms, Image restoration, Image compression, Digital micromirror devices, Equipment, Infrared radiation, Spatial light modulators, Interfaces, Channel projecting optics, Super resolution

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Proceedings Article | 20 May 2022 Presentation + Paper

Presentation + Paper

Compressive sensing instrumental concepts for space applications

Valentina Raimondi, Massimo Baldi, Dirk Berndt, Tiziano Bianchi, Guzmán Borque Gallego, Donato Borrelli, Chiara Corti, Francesco Corti, Marco Corti, Ulrike Dauderstädt, Peter Dürr, Andrea Gonnelli, Sara Francés González, Donatella Guzzi, Detlef Kunze, Demetrio Labate, Nicolas Lamquin, Cinzia Lastri, Enrico Magli, Emiliano Marzi, Vanni Nardino, Christophe Pache, Lorenzo Palombi, Giuseppe Pilato, Enrico Suetta, Diego Valsesia, Michael Wagner

Proceedings Volume 12136, 121360B (2022) https://doi.org/10.1117/12.2625305

KEYWORDS: High resolution satellite images, Spatial light modulators, Sensors, Micromirrors, Compressed sensing, Data acquisition, Super resolution, Aerospace engineering, Modulation, Image compression, Infrared radiation

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SPIE Journal Paper | 21 September 2016 Open Access

Open Access

In situ bow change of Al-alloy MEMS micromirrors during 248-nm laser irradiation

Alexander Mai, Christopher Bunce, Rene Hübner, Daniel Pahner, Ulrike Dauderstädt

JM3, Vol. 15, Issue 03, 035502, (September 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.3.035502

KEYWORDS: Mirrors, Micromirrors, Laser irradiation, Spatial light modulators, Microelectromechanical systems, Transmission electron microscopy, Oxides, Pulsed laser operation, Optical lithography, Reflectivity

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Proceedings Article | 7 March 2014 Paper

Paper

High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications

Jan-Uwe Schmidt, Ulrike Dauderstaedt, Peter Duerr, Martin Friedrichs, Thomas Hughes, Thomas Ludewig, Dirk Rudloff, Tino Schwaten, Daniela Trenkler, Michael Wagner, Ingo Wullinger, Andreas Bergstrom, Peter Bjoernangen, Fredrik Jonsson, Tord Karlin, Peter Ronnholm, Torbjorn Sandstrom

Proceedings Volume 8977, 89770O (2014) https://doi.org/10.1117/12.2036533

KEYWORDS: Spatial light modulators, Mirrors, Modulation, Imaging systems, Copper, Electrodes, Silica, Laser applications, Semiconductor lasers, Laser processing

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Proceedings Article | 16 February 2012 Paper

Paper

One-dimensional light modulator

S. Sinning, I. Wullinger, J.-U. Schmidt, M. Friedrichs, U. Dauderstädt, S. Wolschke, T. Hughes, D. Pahner, M. Wagner

Proceedings Volume 8252, 82520H (2012) https://doi.org/10.1117/12.906651

KEYWORDS: Mirrors, Modulators, Micromirrors, Electrodes, Laser applications, Continuous wave operation, Surface properties, Reflectivity, Microopto electromechanical systems, Printed circuit board testing

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Proceedings Article | 14 February 2011 Paper

Paper

In situ surface topography measurement of MOEMS structures under laser exposure

Alexander Mai, Mathias Krellmann, Steffen Sinning, Steffen Wolschke, Ulrike Dauderstädt, Harald Schenk, Dieter Schmeißer, Michael Wagner

Proceedings Volume 7930, 793010 (2011) https://doi.org/10.1117/12.877062

KEYWORDS: Mirrors, Micromirrors, Interferometers, Spatial light modulators, In situ metrology, Microopto electromechanical systems, Error analysis, Interferometry, Objectives, Phase shifts

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Proceedings Article | 5 February 2010 Paper

Paper

Temperature measurement on MOEMS micromirror plates under illumination

Ingo Wullinger, Dirk Rudloff, Klaus Lukat, Peter Dürr, Mathias Krellmann, Detlef Kunze, Aravind Narayana Samy, Ulrike Dauderstädt, Michael Wagner

Proceedings Volume 7592, 75920P (2010) https://doi.org/10.1117/12.842066

KEYWORDS: Mirrors, Temperature metrology, Convection, Micromirrors, Microopto electromechanical systems, Resistors, Calibration, Resistance, Photonic microstructures, Microsystems

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Proceedings Article | 19 February 2009 Paper

Paper

Advances in SLM development for microlithography

Ulrike Dauderstädt, Per Askebjer, Peter Björnängen, Peter Dürr, Martin Friedrichs, Matthias List, Dirk Rudloff, Jan-Uwe Schmidt, Michael Müller, Michael Wagner

Proceedings Volume 7208, 720804 (2009) https://doi.org/10.1117/12.810787

KEYWORDS: Mirrors, Spatial light modulators, Electrodes, Optical lithography, Micromirrors, Laser systems engineering, Actuators, Aluminum, Deep ultraviolet, Dielectrics

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SPIE Journal Paper | 1 April 2008

Charging effects in micromirror spatial light modulators

Ulrike Dauderstädt, Peter Duerr, Steffen Sinning, Ingo Wullinger, Michael Wagner

JM3, Vol. 7, Issue 02, 021011, (April 2008) https://doi.org/10.1117/12.10.1117/1.2911021

KEYWORDS: Mirrors, Electrodes, Spatial light modulators, Micromirrors, Deep ultraviolet, Oxides, Actuators, Analog electronics, Titanium, Silicon

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Proceedings Article | 19 January 2007 Paper

Paper

Charging effects in spatial light modulators based on micromirrors

Ulrike Dauderstädt, Thor Bakke, Peter Dürr, Steffen Sinning, Ingo Wullinger, Michael Wagner, Hubert Lakner

Proceedings Volume 6463, 64630J (2007) https://doi.org/10.1117/12.700331

KEYWORDS: Mirrors, Electrodes, Spatial light modulators, Oxides, Deep ultraviolet, Micromirrors, Actuators, Titanium, Silicon, Aluminum

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Proceedings Article | 6 January 2006 Paper

Paper

Bending of aluminum alloy beams depending on irradiance and repetition rate of UV laser radiation

Mathias Krellmann, Martin Friedrichs, Ulrike Dauderstädt, Michael Wagner, Hubert Lakner

Proceedings Volume 6111, 611109 (2006) https://doi.org/10.1117/12.647358

KEYWORDS: Ultraviolet radiation, Aluminum, Microopto electromechanical systems, Excimer lasers, Interferometers, Semiconductors, Lithography, Materials processing, Laser ablation, Mirror structures

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SPIE Journal Paper | 1 October 2005

Micro-opto-electro-mechanical systems technology and its impact on photonic applications

Harald Schenk, Alexander Wolter, Ulrike Dauderstädt, Andreas Gehner, Hubert Lakner

JM3, Vol. 4, Issue 04, 041501, (October 2005) https://doi.org/10.1117/12.10.1117/1.2131824

KEYWORDS: Mirrors, Micromirrors, Microopto electromechanical systems, Electrodes, Microelectromechanical systems, Silicon, Semiconducting wafers, Aluminum, Photomicroscopy, Spatial light modulators

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Proceedings Article | 22 January 2005 Paper

Paper

Mechanical stability of spatial light modulators in microlithography

Ulrike Dauderstadt, Peter Duerr, Ulric Ljungblad, Tord Karlin, Harald Schenk, Hubert Lakner

Proceedings Volume 5721, (2005) https://doi.org/10.1117/12.590082

KEYWORDS: Mirrors, Electrodes, Spatial light modulators, Micromirrors, Optical lithography, Laser development, Metals, Microopto electromechanical systems, Photomasks, Titanium

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Proceedings Article | 24 January 2004 Paper

Paper

Application of spatial light modulators for microlithography

Ulrike Dauderstaedt, Peter Duerr, Tord Karlin, Harald Schenk, Hubert Lakner

Proceedings Volume 5348, (2004) https://doi.org/10.1117/12.528798

KEYWORDS: Mirrors, Spatial light modulators, Deep ultraviolet, Laser development, Electrodes, Optical lithography, Micromirrors, Microopto electromechanical systems, Metals, Laser systems engineering

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Proceedings Article | 24 January 2004 Paper

Paper

Photonic microsystems: an enabling technology for light deflection and modulation

Harald Schenk, Alexander Wolter, Ulrike Dauderstadt, Andreas Gehner, Heinrich Grueger, Christian Drabe, Hubert Lakner

Proceedings Volume 5348, (2004) https://doi.org/10.1117/12.523948

KEYWORDS: Mirrors, Photonic microstructures, Microsystems, Modulation, Micromirrors, Microelectromechanical systems, Promethium, Metals, Optical filters, Image filtering

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Proceedings Article | 20 January 2003 Paper

Paper

Characterization of spatial light modulators for microlithography

Peter Duerr, Ulrike Dauderstaedt, Detlef Kunze, Marine Auvert, Thor Bakke, Harald Schenk, Hubert Lakner

Proceedings Volume 4985, (2003) https://doi.org/10.1117/12.477803

KEYWORDS: Spatial light modulators, Cameras, Lithography, Mirrors, Calibration, Deep ultraviolet, Electrodes, Analog modulation, Reflectivity, Spatial filters

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Proceedings Article | 20 January 2003 Paper

Paper

Operation of spatial light modulators in DUV light

Ulrike Dauderstaedt, Peter Duerr, Mathias Krellmann, Tord Karlin, Uldis Berzinsh, Lars Leonardsson, Horst Wendrock

Proceedings Volume 4985, (2003) https://doi.org/10.1117/12.477805

KEYWORDS: Electrodes, Mirrors, Spatial light modulators, Titanium, Deep ultraviolet, Ultraviolet radiation, Oxides, Laser development, Aluminum, Oxygen

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Proceedings Article | 2 October 2001 Paper

Paper

Design and fabrication of micromirror arrays for UV lithography

Hubert Lakner, Peter Duerr, Ulrike Dauderstaedt, Wolfgang Doleschal, Joerg Amelung

Proceedings Volume 4561, (2001) https://doi.org/10.1117/12.443094

KEYWORDS: Mirrors, Spatial light modulators, Micromirrors, Photomasks, Electrodes, Lithography, Ultraviolet radiation, Analog electronics, Modulation, Scanning electron microscopy

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Showing 5 of 19 publications

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