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Wallace He
at ChangXin Memory Technologies, Inc.
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Publications (2)
Proceedings Article | 22 February 2021 Presentation + Paper
Assessment of stochastic fail rate using E-beam massive metrology
Wallace He, Camille Xu, Daniels Bae, Kunyuan Chen, Andy Lan, Richer Yang, Abdalmohsen Elmalk, Aiqin Jiang, Fuming Wang, Double Chung, Shane Su, Kuo-Feng Pao, Oliver Patterson, Sudharshanan Raghunathan, Marc Kea, Jason Liao
Proceedings Volume 11611, 116112B (2021) https://doi.org/10.1117/12.2584739
Proceedings Article | 20 March 2020 Paper
New improving metrology for advanced memory devices with high transmission attenuated phase shift mask
Chia-Hung Chen, Sheng-Tsung Tsao, CongCong Fan, Jie Du, Richer Yang, Asei Chou, Kunyuan Chen, Jimmy Chang, JunJun Zhang, Wallace He, Leslie Zhang, YunSheng Xia
Proceedings Volume 11325, 113252U (2020) https://doi.org/10.1117/12.2552025
KEYWORDS: Optical alignment, Photomasks, Semiconducting wafers, Metrology, Phase shifts, Overlay metrology, Optical proximity correction, Diffraction
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