Ms. Xiaohong Zhao Profile

Xiaohong Zhao

at Beijing Superstring Academy of Memory Technology

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 10 December 2024 Paper

Di Liang, Hao Yang, Yufei Sha, Yuxing Zhou, Jiahao Xi, Enqiang Tian, Cuixiang Wang, Ganlin Song, Xiaohong Zhao, Jiangliu Shi, Miao Jiang

Proceedings Volume 13423, 134230M (2024) https://doi.org/10.1117/12.3052903

KEYWORDS: Line edge roughness, Semiconducting wafers, Critical dimension metrology, Scanning electron microscopy, Lithography

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Keywords/Phrases