Mr. Yu-Fan Lin Profile

Yu-Fan Lin

at National Yang Ming Chiao Tung Univ.

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Publications (2)

Proceedings Article | 1 August 2021 Poster

Distributed optical proximity correction with deep-learning lithographic model for i-line photolithography

Wei-Ping Liao, Yu-Fan Lin, Hsueh-Li Liu, Shu-De Gong, Peichen Yu, You-Chia Chang, Jia-Min Shieh, Chun-Chi Chen, Wen-Hsien Huang

Proceedings Volume 11804, 1180421 (2021) https://doi.org/10.1117/12.2593408

KEYWORDS: Optical lithography, Optical proximity correction, Lithography, Resolution enhancement technologies, Photomasks, Parallel computing, Critical dimension metrology, Algorithm development, Transistors, Semiconductors

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Proceedings Article | 1 August 2021 Poster

Design optimization of a metalens singlet for multimode Gaussian beam shaping

Yu-Fan Lin

Proceedings Volume 11795, 1179527 (2021) https://doi.org/10.1117/12.2594094

KEYWORDS: Gaussian beams, Lenses, Singular optics, Optical simulations, Optical lithography, Near infrared, Glasses, Finite-difference time-domain method, Bessel beams

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