Mr. Youngsu Sung Profile

Youngsu Sung

at SAMSUNG Electronics Co Ltd

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Publications (2)

Proceedings Article | 10 April 2024 Presentation

MBMW's comprehensive requirements and roles for next EUV era and its mass production

Inhwan Noh, Jongmun Park, Heebom Kim, Jin Choi, Sang-Hee Lee, Hojune Lee, Byung-Sup Ahn, Youngsu Sung

Proceedings Volume PC12956, PC1295605 (2024) https://doi.org/10.1117/12.3009572

KEYWORDS: Extreme ultraviolet, Logic

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Proceedings Article | 21 November 2023 Presentation + Paper

Novel method for precise curved EUV mask CD characterization by adopting machine learning

Jaeseo Lee, Inhwan Noh, Youngsu Sung, Heebom Kim, Ji-hoon Kang, Seunghye Kim, Jin Choi

Proceedings Volume 12751, 127510B (2023) https://doi.org/10.1117/12.2687781

KEYWORDS: Education and training, Machine learning, Data modeling, Algorithm development, Modeling, 3D modeling, Feature extraction, Design and modelling, Artificial neural networks, Optical proximity correction

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